Characterization of Capacitive Comb-finger MEMS Accelerometers
Aaditi Joshi, Sangram Redkar, Thomas Sugar
Abstract
This paper discusses various methods for testing the performance of MEMS capacitive comb-finger accelerometers manufactured by Sandia National Laboratories. The use of Capacitive MEMS devices requires complex circuits for measurement of capacitance. Sandia MEMS accelerometer’s capacitance changes in a very small femto-farad (fF) range. The performance of accelerometer is tested using Analog Devices AD7747 sigma-delta capacitance to digital converter. The response of a MEMS capacitive accelerometer to various tests is useful for testing and characterization and investigate it’s suitability for various applications
Keywords
MEMS Capacitive Acclerometers
DOI:
https://doi.org/10.11591/eei.v4i4.546
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Bulletin of EEI Stats
Bulletin of Electrical Engineering and Informatics (BEEI) ISSN: 2089-3191 , e-ISSN: 2302-9285 Institute of Advanced Engineering and Science (IAES) in collaboration with Intelektual Pustaka Media Utama (IPMU) .
